发明名称 METHOD FOR INSPECTING CHIP TYPE SEMICONDUCTOR LIGHT-EMITTING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To easily discover an abnormal shape resulting from dicing in a manufacturing process for a chip type semiconductor light-emitting device. <P>SOLUTION: Marks 9 are put previously on sections on a substrate 1, through which a dicing edge 21 is passed when each semiconductor light-emitting device is parted by the dicing from an intermediate M, in which a plurality of the semiconductor light-emitting devices are continued and unified, and the defective or nondefective of the semiconductor light-emitting devices is decided by whether or not the marks 9 are left on the substrates 1 of the parted semiconductor light-emitting devices. It is preferable that lines having thicknesses thinner than the thickness D of the dicing edge 21 are used as the marks for further improving the accuracy of a decision in this case. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004214476(A) 申请公布日期 2004.07.29
申请号 JP20030000883 申请日期 2003.01.07
申请人 ROHM CO LTD 发明人 OKAZAKI TADAHIRO
分类号 H01L33/00;(IPC1-7):H01L33/00 主分类号 H01L33/00
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