| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus for a spacer tape and a cleaning method for the spacer tape, in which the entire apparatus size is made compact, the processing speed can be accelerated, further, the drying state of the spacer tape can be more uniformized, cleanability is proper and cleaning efficiency is improved. SOLUTION: In the cleaning apparatus for the spacer tape for cleaning a used spacer tape which is continuously conveyed, the cleaning apparatus is provided with a cleaning chamber which is disposed on the upstream side, a drying chamber which is disposed on the downstream side of the cleaning chamber, a cleaning nozzle which is disposed within the cleaning chamber for spouting a cleaning liquid over the front surface of the spacer tape that passes within the cleaning chamber, and a drain means which is disposed in the drying chamber for blowing away the cleaning liquid stuck on the front surface of the spacer tape, that is cleaning within the cleaning chamber and passed inside the drying chamber. COPYRIGHT: (C)2004,JPO&NCIPI
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