| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique, capable of forming a convex lens and a convex lens array, which can select various numeric apertures, in a shorter time than before. SOLUTION: The method for manufacturing the convex lens includes (1) a step for forming a low softening point glass layer on a substrate, (2) a step for forming a mask pattern covering a convex lens formation part on the surface of the low softening point glass layer, (3) a step for dry-etching the exposed part of the low softening point glass layer, (4) a step for removing the mask pattern, (5) a step for transforming a part of the low softening point glass layer left on the substrate into a convex lens shape, by heating the substrate at the temperature for softening only the low softening point glass layer, and (6) a step for forming the convex lens consisting of only the initial substrate material, by further dry-etching the laminated structure consisting of the substrate and the part of the convex lens shape obtained by the step (5) so that at least the thickness of the part of the convex lens shape is removed from the surface of the laminated structure toward the substrate. COPYRIGHT: (C)2004,JPO&NCIPI
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