发明名称 Reciprocating gas valve for pulsing a gas
摘要 A gas valve for pulsing a gas comprises a housing assembly having at least one inlet port, an outlet port, and a selector plate mounted within the housing assembly and comprising at least one timing slot, wherein reciprocation motion of the selector plate periodically couples at least one inlet port to the outlet port through the timing slot.
申请公布号 US2004144309(A1) 申请公布日期 2004.07.29
申请号 US20030354790 申请日期 2003.01.29
申请人 APPLIED MATERIALS, INC. 发明人 YUDOVSKY JOSEPH
分类号 C23C16/44;C23C16/455;(IPC1-7):C23C16/00;H01L21/302;H01L21/461 主分类号 C23C16/44
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