发明名称 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR
摘要 <p>A semiconductor device comprising a semiconductor layer (3), a gate electrode (11) formed on the semiconductor layer (3) via a gate insulation film (10), and a first insulation film (13) formed on the side walls of the semiconductor layer (3), the gate insulation film (10) and the gate electrode (11), the first insulation film (13) covering part of the surface of the gate insulation film (10). This semiconductor device can control a leak current at an element isolation end to improve reliability.</p>
申请公布号 WO2004064164(A1) 申请公布日期 2004.07.29
申请号 WO2004JP00125 申请日期 2004.01.09
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.;SORADA, HARUYUKI;TAKAGI, TAKESHI;ASAI, AKIRA;INOUE, AKIRA 发明人 SORADA, HARUYUKI;TAKAGI, TAKESHI;ASAI, AKIRA;INOUE, AKIRA
分类号 H01L21/336;H01L21/762;H01L29/10;H01L29/786;(IPC1-7):H01L29/786;H01L21/76 主分类号 H01L21/336
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