发明名称 |
SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR |
摘要 |
<p>A semiconductor device comprising a semiconductor layer (3), a gate electrode (11) formed on the semiconductor layer (3) via a gate insulation film (10), and a first insulation film (13) formed on the side walls of the semiconductor layer (3), the gate insulation film (10) and the gate electrode (11), the first insulation film (13) covering part of the surface of the gate insulation film (10). This semiconductor device can control a leak current at an element isolation end to improve reliability.</p> |
申请公布号 |
WO2004064164(A1) |
申请公布日期 |
2004.07.29 |
申请号 |
WO2004JP00125 |
申请日期 |
2004.01.09 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.;SORADA, HARUYUKI;TAKAGI, TAKESHI;ASAI, AKIRA;INOUE, AKIRA |
发明人 |
SORADA, HARUYUKI;TAKAGI, TAKESHI;ASAI, AKIRA;INOUE, AKIRA |
分类号 |
H01L21/336;H01L21/762;H01L29/10;H01L29/786;(IPC1-7):H01L29/786;H01L21/76 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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