| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film defect detecting method by which minute gas through-holes(defect) that exist in a thin film, for example, an electrolyte film used for a fuel cell can be detected easily and also can be repaired when required. <P>SOLUTION: The surface 10a of the electrolyte film 10 used for the fuel cell, whose minute gas through-holes are recognized as the defect because the electrolyte film 10 is originally gas impermeable, is contacted closely to detection vehicle 11. Pressure difference is generated between the surface 10a and the other surface 10b of the electrolyte film 10. Using the pressure difference, it is detected whether the detection vehicle 11 penetrates from the surface 10a to the surface 10b. The defect repairing is also completed as the defect detecting is carried out when a material like silica sol which is solidified after drying is used as the detection vehicle. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
