发明名称 PIEZOELECTRIC OSCILLATOR AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric oscillator the size and cost of which can be reduced. <P>SOLUTION: A circuit pattern 12 of an integrated circuit element 10 is formed to a lower side of a flat plate 11 made of an electric insulating material and a cavity 20 to mount a piezoelectric vibrating chip 5 therein is formed to an upper side of the flat plate 11. Further, a through-hole 24 led from an inner bottom face of the cavity 20 to the circuit pattern 12 is formed, a mount electrode 26 is formed around an opening of the through-hole 24 at the side of the cavity 20 and a conductive film is formed to an inner circumferential face of the through-hole 24 to ensure conduction between the mount electrode 26 and the circuit pattern 12. Then the piezoelectric vibrating chip 5 is mounted to the mount electrode 26. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004214787(A) 申请公布日期 2004.07.29
申请号 JP20020379589 申请日期 2002.12.27
申请人 SEIKO EPSON CORP 发明人 KOYAMA YUUGO
分类号 H01L23/12;H01L23/00;H03B5/32;H03H3/02;H03H9/02;(IPC1-7):H03B5/32 主分类号 H01L23/12
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