| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a gate line and a data line with copper having low electrical resistance and high chemical corrosion resistance. SOLUTION: In the manufacture method of an array substrate for a liquid crystal display device, when the gate line and the data line are formed on the array substrate, metal material having high chemical corrosion resistance and low electrical resistance is used and, thereby, the process is simplified. By utilizing copper as the metal material, the tight adhesiveness between copper and the glass substrate is improved. Further, in order to prevent the reaction of the copper with a silicon component, a copper compound layer is further formed under the copper layer. Such an arrangement allows the copper to be used as wiring and, especially when forming the gate line with copper, the process can be simplified differently from the conventional practice. COPYRIGHT: (C)2004,JPO&NCIPI |
