ELECTRON BEAM DEVICE AND METHOD FOR MANUFACTURING SAMPLE CHAMBER CONTAINER OF ELECTRON BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam device, having a shielding performance of environmental magnetic field. SOLUTION: The electron beam device comprises a mirror cylinder for housing a magnetic field lens for collecting electron beam to a sample, and a sample chamber container for housing the sample. A non-magnetic and conductive material is used as a material of at least one of the mirror cylinder and the sample chamber container body. The material of the mirror cylinder or the sample chamber container body is an aluminum alloy with a side wall thickness of 10 mm or higher. A magnetic material with a thickness less than that of the side wall of the mirror cylinder or the sample chamber container body is provided on the inside of the side wall of the mirror cylinder or the sample chamber container body. COPYRIGHT: (C)2004,JPO&NCIPI