| 摘要 |
PROBLEM TO BE SOLVED: To enable to detect a transmitted electron with a large scattering angle and to observe an STEM image of a high contrast according to a testpiece and a purpose, in a high-resolution scanning electron microscope having an in-lens type objective lens. SOLUTION: A dark field detector 14 is arranged in close proximity location of an objective lens magnetic electrode 12b. Furthermore, in order to control the scattering angle of detected dark field signals 13, a means to move the dark field detector 14 along the optical axis is provided. COPYRIGHT: (C)2004,JPO&NCIPI
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