发明名称 |
MANUFACTURING METHOD FOR OPTICAL DIFFRACTION ELEMENT, AND OPTICAL DIFFRACTION ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To easily manufacture an optical diffraction element of a predetermined design diffraction efficiency. SOLUTION: The optical diffraction element is manufactured by the steps of: forming a lattice plane 11 of a 1st optical material layer 12 with a lattice height corresponding to the predetermined designed lattice height; layering a 1st optical material layer 12 and a 2nd optical material layer 13 having a refractive index difference corresponding to a predetermined refractive index difference on the lattice plane 11 to form a temporary optical diffraction element 10; measuring a diffraction efficiency of the temporary optical diffraction element 10 to obtain the manufacturing error between the measured diffraction efficiency and the designed diffraction efficiency based on the designed lattice height and the designed refractive index difference, and a measured diffraction efficiency; converting the manufacturing error into the refractive index difference between the 1st optical material layer 12 and the 2nd optical material layer 13; and layering the 1st optical material layer 12 and the 2nd optical material layer 13 by adjusting the refractive index difference between both materials so that the refractive index difference becomes the sum of the converted refractive index difference and the designed refractive index difference. COPYRIGHT: (C)2004,JPO&NCIPI
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申请公布号 |
JP2004212495(A) |
申请公布日期 |
2004.07.29 |
申请号 |
JP20020379824 |
申请日期 |
2002.12.27 |
申请人 |
NIKON CORP |
发明人 |
MIYAGAWA AKIKO;NAKAMURA TORU |
分类号 |
G02B5/18;(IPC1-7):G02B5/18 |
主分类号 |
G02B5/18 |
代理机构 |
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