| 摘要 |
PROBLEM TO BE SOLVED: To shorten the measuring time as a whole by reducing the time required for autofocus operation. SOLUTION: This dimension measuring device is provided with an XY moving stage 6 on which a test piece 7 is put, an objective lens 5 movable relatively in the direction of its optical axis with respect to the XY stage 6, detecting elements (X, Y, and Z detecting elements) for detecting the coordinates of the XY stage 6 and the objective lens 5, a focusing section (an objective drive 4, an XY drive 11, etc.) for adjusting the focal position of the objective lens 5 to the surface of the test piece 7 put on the XY stage 6, and a controller 10 which processes detected signals of the detecting elements and controls the XY stage 6 and the focusing section. Based on a measured height of the test piece 7 and a plurality of height threshold values, the pitch of movement of the XY stage 6 being a measurement pitch is changed, and an edge of the test piece 7 is detected using a height threshold value for determining an edge position, out of the height threshold values. COPYRIGHT: (C)2004,JPO&NCIPI
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