Architecture of a reflective spatial light modulator

摘要

A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.