| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning nozzle which can change the ejection condition of a cleaning solution and clean a work having a plurality of cleaning sections different in shape in a short time. SOLUTION: The cleaning nozzle 1 has a nozzle main body 2 having an ejection port 211 for ejecting the cleaning solution S into a channel 212, a spring member 3 having a planar elastic deformation part 31 arranged in the channel 212, a rotatable cam ring 41 having a cam surface 42 with the inside diameter R from the rotational center O changed in the circumferential direction, and a slide member 5 arranged between the elastic deformation part 31 and the cam surface 42. The cleaning nozzle 1 is constituted so that the distance W between the elastic deformation part 31 and the cam surface 42 is changed by rotating the cam ring 41, and the elastic deformation part 31 is brought into contact with the cleaning solution S ejected from the ejection port 211 by sliding the slide member 5 in the diameter direction B to change the ejection condition of the cleaning solution S. COPYRIGHT: (C)2004,JPO&NCIPI
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