DEVICE, METHOD, AND SYSTEM FOR PATTERN FORMING

摘要

In a pattern-forming device (10), a mold (100) for forming a pattern on a substrate (200) is heated to a temperature (T1) equal to or higher than a glass transition temperature (Tg) of a surface layer portion of the substrate (200). In this state, the mold (100) is pressed on the substrate (200) having a temperature equal to or lower than the glass transition temperature (Tg), so that a pattern of the mold (100) is copied. After that, a heater is switched off, the mold (100) is cooled by a cooling block, and then the mold (100) is separated from the substrate (200). It is preferable that a pattern-forming system is formed by providing the pattern-forming device (10) with a feeding device for taking out substrates (200) one by one from a magazine and sequentially feeding them to the pattern-forming device (10).