REAL TIME SPECTRAL IMAGE ANALYSIS DEVICE AND ANALYSIS METHOD

摘要

There are provided a real time spectral image analysis device and an analysis method capable of measuring two-dimensional position information and wavelength information on a sample as a spectral image simultaneously and in real time. The device includes a movable stage (1) on which a sample S is placed, a light source (2) for emitting white light onto a surface of the sample S, a spectroscope (4) for one-degree spectral analysis of the region on one line of the reflected light generated by reflection of the white light from the surface of the sample S, a white-black CCD camera (5)for acquiring the spectrum of the reflection light obtained by the spectroscope (4) as one-dimensional position information and wavelength information into one frame, and a computer (6) for storing, analyzing, and image-processing the one-dimensional position information and the wavelength information acquired by the white-black CCD camera (5) and causing the movable stage (1) to perform one-axis operation on frame basis of the white-black CCD camera (5).