发明名称 METHOD OF FORMING A MULTI-LAYER SEMICONDUCTOR STRUCTURE HAVING A SEAMLESS BONDING INTERFACE
摘要 A method of forming a multi-layer semiconductor structure includes providing a first layer of a patterned copper bond film having a first predetermined thickness onto a first surface of a first semiconductor. The method further includes providing a second layer of a patterned copper bond film having a second predetermined thickness onto a first surface of a second semiconductor. The first and second semiconductor structures can be aligned, such that the first and second patterned copper bond films are disposed in proximity. A virtually seam-less bond can be formed between the first and second patterned copper bond films to provide the first and second semiconductors as the multi-layer semiconductor structure.
申请公布号 AU2003300061(A1) 申请公布日期 2004.07.29
申请号 AU20030300061 申请日期 2003.12.30
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 RAFAEL REIF;ANDY FAN
分类号 H01L21/60;H01L23/48;H01L23/522;H01L25/065 主分类号 H01L21/60
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