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发明名称
FORMATION OF SIC BACKSIDE OHMIC CONTACTS FOR SEMICONDUCTOR DEVICES
摘要
申请公布号
EP1440460(A2)
申请公布日期
2004.07.28
申请号
EP20020769049
申请日期
2002.10.10
申请人
CREE, INC.
发明人
SLATER, DAVID, B., JR.;SUVOROV, ALEXANDER
分类号
H01L21/04;H01L21/28;H01L21/265;H01L31/0224;H01L33/00;H01L33/34;H01L33/36;(IPC1-7):H01L21/04
主分类号
H01L21/04
代理机构
代理人
主权项
地址
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