F2 laser with visible red and IR control,申请号EP20000111119-传众专利搜索

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发明名称	F2 laser with visible red and IR control
摘要
申请公布号	EP1100167(B1)	申请公布日期	2004.07.28
申请号	EP20000111119	申请日期	2000.05.23
申请人	CYMER, INC.	发明人	ONKELS, ECKEHARD D.;SANDSTROM, RICHARD L.;DUFFEY, THOMAS P.
分类号	H01S3/225;G03F7/20;H01S3/036;H01S3/23;(IPC1-7):H01S3/225;H01S3/03;H01S3/097	主分类号	H01S3/225
代理机构		代理人
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