MULTILEVEL POLY-SI TILING FOR SEMICONDUCTOR CIRCUIT MANUFACTURE,申请号EP20020775132-传众专利搜索

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发明名称	MULTILEVEL POLY-SI TILING FOR SEMICONDUCTOR CIRCUIT MANUFACTURE
摘要
申请公布号	EP1440468(A2)	申请公布日期	2004.07.28
申请号	EP20020775132	申请日期	2002.10.16
申请人	KONINKLIJKE PHILIPS ELECTRONICS N.V.	发明人	HENDRIKS, ANTONIUS, M., P., J.;DORMANS, GUIDO, J., M.;VERHAAR, ROBERTUS, D., J.
分类号	H01L21/3065;H01L21/3213;H01L21/822;H01L21/8234;H01L21/8247;H01L27/02;(IPC1-7):H01L21/822;H01L21/321;H01L21/823;H01L21/824	主分类号	H01L21/3065
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