METHOD OF ETCHING HIGH ASPECT RATIO FEATURES,申请号EP20020773707-传众专利搜索

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发明名称	METHOD OF ETCHING HIGH ASPECT RATIO FEATURES
摘要
申请公布号	EP1439900(A2)	申请公布日期	2004.07.28
申请号	EP20020773707	申请日期	2002.10.31
申请人	TOKYO ELECTRON LIMITED	发明人	MOSDEN, AELAN;HYLAND, SANDRA;KAJIMOTO, MINORI
分类号	H01L21/3065;H01L21/00;H01L21/67;(IPC1-7):B01J2/00	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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