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发明名称
摘要
申请公布号
JP3548563(B2)
申请公布日期
2004.07.28
申请号
JP20020311122
申请日期
2002.10.25
申请人
发明人
分类号
H01L21/28;H01L21/314;H01L21/316;H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L21/316;H01L21/824
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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