发明名称 Sintered body and film forming method using the same
摘要 A sintered body comprising 95 Wt% or more germanium and tungsten. The sputtering is executed by using sintered body as a target, thereby forming a resistance film to a spacer of an image forming apparatus using electron beam emitting devices and the like. Thus, the resistance film having excellent controllability and high reproducibility can be stably formed. <IMAGE>
申请公布号 EP1441038(A1) 申请公布日期 2004.07.28
申请号 EP20040001183 申请日期 2004.01.21
申请人 CANON KABUSHIKI KAISHA 发明人 SATO, TORU
分类号 C22C1/04;C23C14/06;C23C14/34;H01J9/18;H01J9/24;H01J29/02;H01J29/86;H01J29/88;H01J31/12;(IPC1-7):C22C1/04 主分类号 C22C1/04
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