| 摘要 |
An exposure apparatus having an exposure mode that transfers a pattern on a reticle (120) onto an object (140), and a standby mode that waits for exposure includes an optical system for introducing the exposure light to the object in the exposure mode, and a mechanism for allowing the exposure light to enter the reticle and/or the optical system in the standby mode, and for preventing the exposure light from entering the object in the standby mode.
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