| 摘要 |
<p>A laser machining apparatus has a stationary base (2), a chuck table mechanism (3) for holding a workpiece, the chuck table mechanism (3) being disposed on the stationary base (2), and a laser beam shining unit support mechanism (4), also disposed on the stationary base (2). A laser beam shining unit (5) is disposed on the laser beam shining unit support mechanism (4). A pair of nozzles (62, 63) is mounted to each side of an optical condenser (524), which forms part of the laser beam shining unit (5). In use, a stream of gas is directed from the nozzles (62, 63) onto the workpiece at the position on which the laser beam shines, resulting in the removal of any debris caused by the cutting action of the laser beam. <IMAGE></p> |
