| 发明名称 |
Aqueous dispersion containing cerium oxide-coated silicon powder, process for the production thereof and use thereof |
| 摘要 |
The present invention relates to an aqueous dispersion containing a silicon dioxide powder coated with cerium oxide. In addition, the present invention provides a method of producing an aqueous dispersion containing a silicon dioxide powder coated with cerium oxide and methods of using this aqueous dispersion for chemical-mechanical polishing. |
| 申请公布号 |
US6767377(B2) |
申请公布日期 |
2004.07.27 |
| 申请号 |
US20030358323 |
申请日期 |
2003.02.05 |
| 申请人 |
DEGUSSA AG |
发明人 |
SCHUMACHER KAI;MANGOLD HELMUT;MEYER JUERGEN;LORTZ WOLFGANG;BATZ-SOHN CHRISTOPH |
| 分类号 |
B24B37/00;B01J13/00;C09C1/30;C09G1/02;C09K3/14;H01L21/304;H01L21/3105;(IPC1-7):C09G1/02;C09G1/04;H01L21/02;H01L21/302;B32B1/00 |
主分类号 |
B24B37/00 |
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