| 摘要 |
PURPOSE: An electric leakage cell detector of a semiconductor equipment is provided to exchange rapidly a bad battery cell by detecting only an electric leakage cell number from backup battery cells. CONSTITUTION: An electric leakage cell detector of semiconductor equipment includes an electric leakage storage battery information block(5), a monitoring part(20), and an operating part(30). The electric leakage storage battery information block(5) is connected to a battery set(S1) in order to measure a state of electric leakage and a voltage corresponding to an electric leakage cell. The monitoring part(20) detects the state of electric leakage and an electric leakage cell number, and pages the detected electric leakage cell number. The operating part(30) performs a switching control operation in order to exchange the electric leakage cell.
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