发明名称 Continuous-zoom imaging device of interferometer
摘要 The present invention provides a continuous-zoom imaging device of an interferometer. Reflected lights of a reference plane and a test plane interfere with each other to generate an interference pattern. A collimation device converts a parallel light of the interference pattern into a convergent light. An optical path adjustment means guides the light to a polarizing beam splitter. A continuous-zoom device adjusts the magnification ratio of the interference pattern on the imaging passageway and to output an object image, which is then imaged on a charge-coupled device. The present invention can improve the quality of the interference pattern without using any rotating diffuser, and thus has the characteristics of reduced number of components, lowered cost, and shrunk volume. Besides, the present invention can utilize a joint device to connect the continuous-zoom device and an attenuator so as to achieve automatic light adjustment and convenient operation.
申请公布号 US6768553(B2) 申请公布日期 2004.07.27
申请号 US20020200204 申请日期 2002.07.23
申请人 K LASER TECHNOLOGY, INC. 发明人 OU-YANG MANG;SHIUE SHIN-GWO;TSENG SHIN-MAIO;KUO KEVIN S.H.;LIU HSIN-CHU;CHIEN I-PEN;CHUNG JIM
分类号 G01B9/02;G02B27/28;(IPC1-7):G01B9/02;G01B11/26;G01B11/00;G01J1/00 主分类号 G01B9/02
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