Method and apparatus providing reduced polarization-dependent loss

摘要

A diffraction grating providing reduced polarization dependent loss. The elements of pixels of the diffraction grating are fixed or actuated such that some grating elements are actuated to correspond to a positive polarization dependent loss and others are actuated to correspond to a negative polarization dependent loss. The pixels may include multiples of three grating elements or multiples of four grating elements. An electrostatic beam structure providing increased actuation in a direction away from a substrate may be used in a diffraction grating providing reduced polarization dependent loss.