VALVE AND CHEMICAL SUPPLY SYSTEM USING THE SAME

摘要

PURPOSE: A valve and a chemical supply system using the same are provided to open or shut a flowing path and prevent the damage of the chemical supply system by using only the pressure of chemicals. CONSTITUTION: A chemical supply system includes a chemical storage unit, a chemical supply line, a buffer, a chemical return line, and a valve. The chemical storage tank(10) stores chemicals. The chemical supply line(50) is connected to the chemical storage tank. The buffer(20) is used for supplying the chemicals to one or more etch units and one or more cleaning units. The chemical return line(60) is used for receiving the excess of the chemicals from the buffer and returning the excess of the chemicals. The valve(100) is installed on the chemical return line to open or shut a path of the chemical return line.