| 摘要 |
PURPOSE: A gas supply line system is provided to prevent a mixing error of gases in lines for supplying plural gases by using plural controllers, a pneumatic controller, and an interruption controller. CONSTITUTION: A gas supply line system includes a plurality of lines, a plurality of controllers, and a pneumatic controller. The lines are used for transferring gases. The controllers(26,27) are installed on each line in order to control the flow of the gases. The pneumatic controller(25) is used for controlling a driving operation of the controller installed on the same line of the lines. The gas supply line system further includes an interruption controller(28) to control the flow of the line corresponding to the target gas. The interruption controller is connected to the pneumatic controller through an air flow line.
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