BONDING DEVICE AND ITS CONTROLLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a bonding device and its controlling method which highly accurately align an image coordinate system and a driving coordinate system independently of the distortion of a photographed image and axis misalignment between both the coordinate systems. SOLUTION: The distortion of an image photographed by a chip recognition camera 51 (and a substrate recognition camera 52) is detected, a coordinate transformation formula for correcting the distortion is detected and stored. Then a coordinate transformation coefficient for correcting the coordinates of the image corrected by the coordinate transformation formula to coordinates for moving the camera is detected and stored. COPYRIGHT: (C)2004,JPO&NCIPI