METHOD OF FORMING PROTRUDING METAL PORTIONS BY DIFFERENTIAL PLANARIZATION

摘要

A metal layer is separated by intermetal gaps differing in width into a plurality of metal portions (102-105, 110, 111) after a normal damascene process. A further chemical-mechanical polishing step causes the metal portions to protrude from substrate (100), the portions (102-105) separated by wide intermetal gaps projecting higher than the portions (110, 111) showing narrow intermetal gaps.