摘要 |
PROBLEM TO BE SOLVED: To solve the problem that doping of a different kind of metal into an Ag film causes such defects as an increase in surface resistance and reflectivity of the Ag film, resulting in making it difficult to use the Ag film in a front face of a display such as a PDP. SOLUTION: In an electromagnetic shielding film wherein the Ag film and an oxide film are alternately formed on a base material, a zinc oxide film containing 1-10 at.% of Al is formed between the Ag film and the oxide film. In the electromagnetic shielding film, the uppermost layer is made of the oxide film. COPYRIGHT: (C)2004,JPO&NCIPI
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