| 摘要 |
PROBLEM TO BE SOLVED: To provide an active energy ray irradiation device for economizing gas consumption by reusing supplied gas when the gas containing a concentration of oxygen suitable to treatment conditions at the irradiation part is supplied to an irradiation part in the active energy ray irradiation device. SOLUTION: This active energy ray irradiation device is equipped with a mechanism for conducting, to an active energy ray irradiation part, gas of a high oxygen concentration or gas of a low oxygen concentration supplied to the irradiation part correspondently to the conditions of irradiation, and an active energy ray irradiation mechanism such as an active energy ray generating lamp. The gas conducted to the irradiation part is sucked and again conducted to the irradiation part. COPYRIGHT: (C)2004,JPO&NCIPI
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