ZrB2 SINGLE CRYSTAL, ITS MANUFACTURING METHOD AND SUBSTRATE FOR SEMICONDUCTOR THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a ZrB2single crystal having a large diameter and high quality. SOLUTION: The single crystal consisting of ZrB2has≥15 mm maximum diameter, and in particular, it preferably contains Cr by 0.1 to 10 mol%. COPYRIGHT: (C)2004,JPO&NCIPI