| 摘要 |
PROBLEM TO BE SOLVED: To provide a composite substrate that is superior in dimensional accuracy and productivity, and to provide its manufacturing method. SOLUTION: The composite substrate is provided with a ceramic substrate 3, a metallic member 1 wherein a recessed part 2 is formed on the bonding surface with the ceramic substrate 3, and a bonding material 4 provided in the recessed part 2. The ceramic substrate 3 and the metallic member 1 are joined by the bonding material 4. COPYRIGHT: (C)2004,JPO&NCIPI
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