| 摘要 |
PROBLEM TO BE SOLVED: To make strict optical axis adjustment or the like unnecessary even when a light source or the like is replaced. SOLUTION: The light outputted from a main light source unit 21, is conditioned in a first optical system 24 to be parallel and uniform in the strength thereof, while the light outputted from an auxiliary light source unit 25 consisting of a plurality of light sources (light emitting diodes) 27 is made parallel in a second optical system 30. The light from the main light source unit 21 through the first optical system 24, and the light from the auxiliary light source unit 25 through the second optical system 30, are put together in a third optical system 31, and the resultant light is guided onto an inspection surface as the inspection light. On the other hand, a second half mirror 33 for constituting the third optical system 31 takes out one part of the inspection light before arriving at the inspection surface as the reference light to receive the same by a reference light detecting unit (two dimensional CCD) 34. A control unit 36 controls the strength of the light outputted from respective light sources 27 so that the strength of the reference light becomes uniform in a monitor region on a reference surface corresponding to a predetermined region on the inspection surface. COPYRIGHT: (C)2004,JPO&NCIPI
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