摘要 |
PROBLEM TO BE SOLVED: To provide an improved flow sensor to allow economical production of the flow sensor, simple assembling, and a wide range of use. SOLUTION: In this flow sensor having an obstacle 8 protruded into a flow, and at least one measuring probe 10 for measuring a vortex generated by the obstacle 8, the measuring probe 10 is provided with at least one membrane 12, and a measuring element provided directly onto the membrane 12 to detect deflection of the membrane. COPYRIGHT: (C)2004,JPO&NCIPI
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