| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an abrasive liquid composition which enables surface roughness (TMS-Ra) of a substrate of a memory hard drive disk to lower to a sufficient level to practically be used; to provide a lowering method for the surface roughness (TMS-Ra) of the substrate of the memory hard drive disk, using the abrasive liquid composition; and to provide a production method for the substrate of the memory hard drive disk. <P>SOLUTION: The abrasive liquid composition for the substrate of the memory hard disk drive. comprises water and silica particles having a specific molecular size distribution. The method for lowering the surface roughness (TMS-Ra) of the substrate of the memory hard drive disk, involves a process of polishing the substrate, using the liquid composition. The production method for the substrate involves a process of polishing the substrate plated with Ni-P, using the liquid composition. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
