OPTICAL WAVEGUIDE STRUCTURE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a new method of manufacturing an optical waveguide structure, which eliminates the need of removing a remaining film of a resist layer used for core patterning. SOLUTION: The method of manufacturing an optical waveguide structure having a core and a clad includes steps of; forming a lower clad layer on a substrate; forming a core layer on the lower clad layer; forming a resist layer on the core layer; patterning the resist layer into an optical waveguide shape; forming the core by etching the core layer through the patterned resist layer by reactive-ion etching till the lower clad part is exposed; and forming an upper clad layer on the exposed lower clad and the resist layer remaining on the core. COPYRIGHT: (C)2004,JPO&NCIPI