| 摘要 |
PROBLEM TO BE SOLVED: To effectively move a truck running on complicated and varieties of carrying passages. SOLUTION: A carrying equipment control device 11 is one for determining a carrying route of the trucks 7A to 7C for carrying a semiconductor wafer from a before-stocker transfer point 6 of a carrying origin station, to another before-stocker transfer point 6 of a carrying destination station. The device comprises a determination circuit for determining a carrying route from the carrying origin station to the carrying destination station based upon a layout of the before-stocker transfer point 6 and a branch point 3, a calculation circuit for calculating the amount of loading of the carrying in the carrying route determined on the basis of the determining circuit, a creation circuit for creating jam-up information when the calculated amount of loading exceeds a predetermined threshold, and a setting circuit for resetting, for every time the trucks 7A to 7C reach the branch point 3, the carrying passage from the arriving branch point 3 to the carrying destination station taking the jam-up information into consideration. COPYRIGHT: (C)2004,JPO&NCIPI
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