| 摘要 |
PROBLEM TO BE SOLVED: To provide treatment equipment which has a filtering means in its gas passage for preventing mist and/or particles contained in a material from getting into its treatment vessel. SOLUTION: This treatment equipment has a material gas supply system 26 which supplies a material gas to a treatment vessel 4 via a gas passage 28, the treatment vessel 4 containing a table to place an object to be treated, and an evacuation system 20 which evacuates the treatment vessel. A first bypass passage 36 is provided between the gas passage and evacuation system, and a first switching valve 34 is installed in the gas passage. In addition, a second switching valve 38 is installed in the first bypass passage, and a filtering means 32, which removes particles and/or mist contained in the material gas, is installed in the gas passage, at a position downstream of the branch point between the gas passage and the first bypass passage. COPYRIGHT: (C)2004,JPO&NCIPI
|
