| 摘要 |
A conveying device for a plate-like workpiece, comprising a suction-holding means for suction-holding the plate-like workpiece and a moving means for moving the suction-holding means between a first predetermined position and a second predetermined position, wherein the suction-holding means comprises a plate-like workpiece holding member, non-contact suction-holders disposed on the under surface of the center area of the plate-like workpiece holding member, a restricting means which is mounted on the under surface of the peripheral area of the plate-like workpiece holding member and restricts the movement in the horizontal direction of the plate-like workpiece, and a plurality of falling prevention means which are mounted in the peripheral area of the plate-like workpiece holding member at predetermined intervals in the circumferential direction and prevent the falling of the plate-like workpiece adsorbed by the non-contact suction-holders.
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