| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an abrasive liquid composition for markedly reducing micropits on the abraded products after the abrasion work and can attain the economical abrasion that is used for abrasion of substrates of memory hard disks, a method for reducing micropit using the abrasive liquid composion and to provide a method of producing the substrates by using the abrasion liquid composition. <P>SOLUTION: This invention is an abrasive liquid composition in which the content of the silica particles having particle sizes of 5-120 nm in an abrasive material is≥50 vol. %, the content of the small particles having particle sizes of 5-40 nm is 10-70 vol.% on the basis of the total amount of the particles having particle sizes of 5-120 nm in terms of the abrasive material, the content of the middle-sized particles having particle sizes of 40 or more and less than 80 nm is 20-70 vol.% on the basis of the total amount of 5-120 nm and the content of the large particles having particle sizes of 80-120 nm is 0.1-40 vol.% on the basis of the total silica 5-120 nm particles. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
