NOZZLE CLOGGING DETECTOR, LIQUID DROP DISCHARGER, ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE MANUFACTURING METHOD AND ELECTRONIC INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a nozzle clogging detector reduced in constrictions on installation, high in accuracy, and capable of reducing a treatment load; a liquid drop discharger having the detector; the manufacturing method of an electro-optical device employing the liquid drop discharger; the electro-optical device manufactured by employing the method; and an electronic instrument mounting the electro-optical device thereon. SOLUTION: Existence of nozzle clogging is detected by the change of resonant frequency of a piezo-electric element as shown in a diagram. The change of resonant frequency of the piezo-electric element can be detected by the adhesion of one drop of liquid onto an electrode whereby it is not necessary to discharge a plurality of drops of the liquid from the nozzle. Therefore, an economical load is remarkably reduced. COPYRIGHT: (C)2004,JPO&NCIPI