发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device of a smaller size. SOLUTION: The semiconductor device comprises a semiconductor substrate 1, an active region formed on the semiconductor substrate 1, a field insulating film 6 that separates the active regions adjoining each other, an insulating film layer 7 formed on the semiconductor substrate 1 to cover the active region and the field insulating film 6, and an electrode pad 12 formed on the insulating layer 7. The active region is composed of a source region 2, a drain region 3, and a channel region under a gate oxide film 5, and is formed on the semiconductor substrate 1 directly below the electrode pad 12. The electrode pad 12 is so arranged that its peripheral part is not positioned directly above the gate oxide film 4. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004207509(A) 申请公布日期 2004.07.22
申请号 JP20020375223 申请日期 2002.12.25
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KUMAKAWA TAKAHIRO;UENO JUNICHI
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L29/78;(IPC1-7):H01L29/78;H01L21/320 主分类号 H01L23/52
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