Camera control device for imaging moving object, e.g. for chip manufacture, calculates picture-taking position based on movement data and processing period between trigger signal

摘要

A position detector positions the camera (2) along a predetermined path relative to the object (3). A correction module (13) calculates a picture-taking position at which an exposure trigger signal is to be output, using calculated movement data and a predetermined exposure processing period between the exposure trigger signal and the start of the triggered camera exposure. Independent claims are included for a monitoring apparatus, and for a camera control method.