| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage in a simple structure in which the temperature distribution of a plate is uniformly constant while keeping airtightness between the inside and outside of a stem during temperature rise. SOLUTION: The stage 1 comprises the plate 2, the stem 3, a seal ring 4, a cover 5 and an exhaust device 6. The plate 2 incorporates a heater 8. A terminal 10 of the heater 8 is exposed from the plate 2. The stem 3 is provided in the form of a cylinder surrounding the terminal 10. The plate 2 facing the stem 3 forms a first seal face 14, and the stem 3 facing the plate 2 forms a second seal face 15. The seal ring 4 is inserted between the first seal face and the second seal face 15. The cover 5 is provided with a passage 24 communicating with the inside of the stem 3. The exhaust device 6 is provided in a passage 24. The inside of the stem 3 is evacuated with the exhaust device 6. COPYRIGHT: (C)2004,JPO&NCIPI |
