| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, although for preventing an optical bench of a gas laser oscillation apparatus from being finely deformed owing to tensile force exerted between the optical bench and a circumferential member, opposing force is produced on the opposite side of a gas piping of the optical bench using a cylinder or the like to keep the balance among forces acted on the optical bench, the apparatus is large-sized because of a space where the cylinder is disposed. SOLUTION: In the gas laser oscillation apparatus, a gas circulating piping connected to the optical bench is used as an inner cylinder, and a cylinder is formed outside the inner cylinder to generate opposing force to force between the optical bench and the circumferential member for balancing force. Further, pressure in the cylinder can be made equal to that in the gas piping by providing a hole in the gas piping. Likewise, laser gas, cooling water, and compressed air or the like ordinarily used as motive force in the gas laser oscillation apparatus are supplied into the outside cylinder which uses the gas piping connected to the optical bench as the inner cylinder to impart pressure. Consequently, the problem is solved. COPYRIGHT: (C)2004,JPO&NCIPI
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